LOW LOSS MILLIMETER-WAVE SEMICONDUCTOR WAFER PROBES

Award Information
Agency: Department of Defense
Branch: Army
Contract: N/A
Agency Tracking Number: 5621
Amount: $57,489.00
Phase: Phase I
Program: SBIR
Awards Year: 1987
Solicitation Year: N/A
Solicitation Topic Code: N/A
Solicitation Number: N/A
Small Business Information
Cascade Microtech Inc
14155 Sw Brigadoon Ct - Ste B, Beaverton, OR, 97005
DUNS: N/A
HUBZone Owned: N
Woman Owned: N
Socially and Economically Disadvantaged: N
Principal Investigator
 KEITH JONES
 (503) 626-8245
Business Contact
Phone: () -
Research Institution
N/A
Abstract
MAKING ACCURATE AUTOMATED ON-WAFER MEASUREMENTS OF MILLIMETER-WAVE SEMICONDUCTOR DEVICES AND CIRCUIT ELEMENTS IS A FUNDAMENTAL REQUIREMENT FOR THE ADVANCEMENT OF A MILLIMETER-WAVE TECHNOLOGY. MILLIMETER-WAVE WAFER PROBE DEVELOPMENT IS REQUIRED. PRESENTLY ON-WAFER PROBING IS AVAILABLE ONLY TO 26.5 GHZ. HOWEVER, SIGNIFICANT INNOVATIONS ARE REQUIRED TO EXTEND THIS CAPABILITY OF HIGHER FREQUENCIES. THIS WORK INVESTIGATES THE FEASIBILITY OF OVERCOMING WAFER PROBE INSERTION LOSS PROBLEMS IN THE MILLIMETER-WAVE BANDS. PHASE I RESULTS IN PROTOTYPES OF DC TO 50 GHZ WAFER PROBES WITH LESS THAN 2 DB INSERTION LOSS FOR THE MEASUREMENT OF ACTIVE MILLIMETER-WAVE DEVICES ON-WAFER. THESE RESULTS WILL PROVIDE A BASIS FOR MILLIMETER-WAVE NOISE FIGURE AND DYNAMIC RANGE MEASUREMENTS IN LATER WORK.

* information listed above is at the time of submission.

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