110 GHZ ON-WAFER MEASUREMENTS AND ELEMENT MODELING

Award Information
Agency:
Department of Defense
Branch
Defense Advanced Research Projects Agency
Amount:
$49,961.00
Award Year:
1990
Program:
SBIR
Phase:
Phase I
Contract:
n/a
Award Id:
13206
Agency Tracking Number:
13206
Solicitation Year:
n/a
Solicitation Topic Code:
n/a
Solicitation Number:
n/a
Small Business Information
14255 Sw Brigadoon Ct, Beaverton, OR, 97005
Hubzone Owned:
N
Minority Owned:
N
Woman Owned:
N
Duns:
n/a
Principal Investigator:
Keith Jones
(503) 626-8245
Business Contact:
() -
Research Institute:
n/a
Abstract
ON-WAFER MICROWAVE PROBE MEASUREMENTS HAVE DEMONSTRATED THEIR UNIQUE PERFORMANCE AND PRODUCTIVITY GAINS IN SEMICONDUCTOR RESEARCH, DEVELOPMENT AND PRODUCTION ACTIVITIES. HOWEVER, DEVICE PERFORMANCE CONTINUES TO OUTPACE OUR ABILITY TO MEASURE AT THE WAFER LEVEL. AS PROBE PERFORMANCE CONTINUES INTO MILLIMETER WAVELENGTHS, THE MEASUREMENT CHALLENGE INCREASES. FORMERLY NEGLIGIBLE PROBE CONNECTION PARASITICS GROW IN MAGNITUDE WHILE THE DUT GEOMETRY AND PARASITICS TYPICALLY SHRINK. THIS PROPOSAL ADDRESSES ON-WAFER MILLIMETER-WAVE MEASUREMENT ISSUES TO 110 GHZ IN THE AREAS OF CALIBRATION STANDARD ELEMENTS AND METHODS, FET PATTERNS, S-PARAMETER MEASUREMENT TECHNIQUES AND NOISE PARAMETER MEASUREMENTS. ANTICIPATED BENEFITS/POTENTIAL COMMERCIAL APPLICATIONS - AVAILABILITY OF ON-WAFER SEMICONDUCTOR MEASUREMENT CAPABILITY TO 110 GHZ. KEY WORDS - WAFER, MILLIMETER, PROBE, FET, NOISE, CALIBRATION, S-PARAMETERS, MEASUREMENT.

* information listed above is at the time of submission.

Agency Micro-sites


SBA logo

Department of Agriculture logo

Department of Commerce logo

Department of Defense logo

Department of Education logo

Department of Energy logo

Department of Health and Human Services logo

Department of Homeland Security logo

Department of Transportation logo

Enviromental Protection Agency logo

National Aeronautics and Space Administration logo

National Science Foundation logo
US Flag An Official Website of the United States Government