110 GHZ ON-WAFER MEASUREMENTS AND ELEMENT MODELING

Award Information
Agency: Department of Defense
Branch: Defense Advanced Research Projects Agency
Contract: N/A
Agency Tracking Number: 13206
Amount: $49,961.00
Phase: Phase I
Program: SBIR
Awards Year: 1990
Solicitation Year: N/A
Solicitation Topic Code: N/A
Solicitation Number: N/A
Small Business Information
Cascade Microtech Inc
14255 Sw Brigadoon Ct, Beaverton, OR, 97005
DUNS: N/A
HUBZone Owned: N
Woman Owned: N
Socially and Economically Disadvantaged: N
Principal Investigator
 Keith Jones
 (503) 626-8245
Business Contact
Phone: () -
Research Institution
N/A
Abstract
ON-WAFER MICROWAVE PROBE MEASUREMENTS HAVE DEMONSTRATED THEIR UNIQUE PERFORMANCE AND PRODUCTIVITY GAINS IN SEMICONDUCTOR RESEARCH, DEVELOPMENT AND PRODUCTION ACTIVITIES. HOWEVER, DEVICE PERFORMANCE CONTINUES TO OUTPACE OUR ABILITY TO MEASURE AT THE WAFER LEVEL. AS PROBE PERFORMANCE CONTINUES INTO MILLIMETER WAVELENGTHS, THE MEASUREMENT CHALLENGE INCREASES. FORMERLY NEGLIGIBLE PROBE CONNECTION PARASITICS GROW IN MAGNITUDE WHILE THE DUT GEOMETRY AND PARASITICS TYPICALLY SHRINK. THIS PROPOSAL ADDRESSES ON-WAFER MILLIMETER-WAVE MEASUREMENT ISSUES TO 110 GHZ IN THE AREAS OF CALIBRATION STANDARD ELEMENTS AND METHODS, FET PATTERNS, S-PARAMETER MEASUREMENT TECHNIQUES AND NOISE PARAMETER MEASUREMENTS. ANTICIPATED BENEFITS/POTENTIAL COMMERCIAL APPLICATIONS - AVAILABILITY OF ON-WAFER SEMICONDUCTOR MEASUREMENT CAPABILITY TO 110 GHZ. KEY WORDS - WAFER, MILLIMETER, PROBE, FET, NOISE, CALIBRATION, S-PARAMETERS, MEASUREMENT.

* information listed above is at the time of submission.

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