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On-Wafer Measurement Accuracy Assessment Tool Kit

Award Information
Agency: Department of Commerce
Branch: N/A
Contract: 332
Agency Tracking Number: 30874
Amount: $49,848.00
Phase: Phase I
Program: SBIR
Solicitation Topic Code: N/A
Solicitation Number: N/A
Solicitation Year: N/A
Award Year: 1995
Award Start Date (Proposal Award Date): N/A
Award End Date (Contract End Date): N/A
Small Business Information
Beaverton, OR 97005
United States
HUBZone Owned: No
Woman Owned: No
Socially and Economically Disadvantaged: No
Principal Investigator
 John E. Pence
 Product Marketing Manager
 () -
Business Contact
Phone: () -
Research Institution

The traceability of on-wafer calibration standards has long been an issue among the microwave measurement community, and the proliferation of new calibration methods, elements, and applications only exacerbates the problem. This diversity in calibration needs has made traceability of a physical reference impractical. As a result, the NIST developed a procedure which can compare on-wafer calibrations to a NIST Benchmark GaAs TRL calibration. In general, the measurement community recognizes the potential value of the procedure, but is unwilling to accept the investment of time and effort currently necessary to perform the procedure correctly. The technical challenge is to develop new on-wafer calibration accuracy assessment tools which are easy to use, widely accessible, fast, and adaptable to changing calibration needs. These accuracy assessment tools will automate wafer chuck and microwave probe positioning, vector network analyzer calibration, and calibration verification based on the NIST algorithms used in the DEEMBED and VERIFY programs. The tools will be implemented for use on a PC platform in a modular format which is easily accessible.

* Information listed above is at the time of submission. *

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