Advanced NDE for SiC Optics Using Single Crystal Piezoelectric Composite Transducers with Broad Bandwidth and High Sensitivity
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2820 East College Avenue, State College, PA, 16801
AbstractTRS is pleased to propose an advanced NDE system for SiC mirror defect and stress measurement using single crystal piezoelectric composite transducers with broad bandwidth and high sensitivity. The broadband HF transducers are expected to contribute to high spatial resolution in both the lateral and axial directions as well as deeper penetration depth in NDE imaging, which will greatly benefit in-situ detection of SiC mirror SD, SSD and trapped internal stress measurements. The goal of this program is to develop a NDE imaging tool for in-situ SiC mirror subsurface damage detection with minimum detectable lateral dimension < 10 microns and minimum detectable axial dimension <100 nm, and with detection depth ranging from sub-micron to > 10 cm. Internal stress measurement using single crystal composite transducers will be studied and compared with the conventional transducers used in LCR stress measurements. In Phase II a high frequency transducer array and LCR stress measurement probe will be integrated for in-situ NDE for SiC optics.
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