EPITAXIAL FILM BAND GAP/COMPOSITION MAPPING USING ELECTRON BEAM ELECTROREFLECTANCE: OPTICAL CHARACTERIZATION OF HIGH X ALGAAS WAFERS

Award Information
Agency:
Department of Defense
Branch
Air Force
Amount:
$49,963.00
Award Year:
1989
Program:
SBIR
Phase:
Phase I
Contract:
n/a
Award Id:
9693
Agency Tracking Number:
9693
Solicitation Year:
n/a
Solicitation Topic Code:
n/a
Solicitation Number:
n/a
Small Business Information
301 Chesapeake Dr, Redwood City, CA, 94063
Hubzone Owned:
N
Minority Owned:
N
Woman Owned:
N
Duns:
n/a
Principal Investigator:
Dr Michael H Herman
(415) 369-4567
Business Contact:
() -
Research Institution:
n/a
Abstract
IN PHASE I, WE PROPOSE TO INVESTIGATE THE USE OF ELECTRON BEAM ELECTRO-REFLECTANCE (EBER) TO AUTOMATICALLY MAP THE BAND GAP OF HIGH X ALGAAS (X>0.38) EPITAXIAL FILMS ON FULL, 3 INCH GAAS SUBSTRATES AT ROOM TEMPERATURE. THESE COMPOSITIONS OF ALGAAS ARE IMPORTANT FOR HIGH-EFFICIENCY GRINSCH LASERS AND OTHER APPLICATIONS, BUT AS THE CRYSTAL SWITCHES TO AN INDIRECT GAP ABOVE THIS X VALUE, TRADITIONAL OPTICAL METHODS SUCH AS PHOTOLUMINESCENCE (PL) FAIL. WE HAVE ALREADY BEEN SHOWN THAT HIGH X AL(X)GA(1-X)AS FILMS MAY BE SUCCESSFULLY TESTED BY EBER DURING EARLIER RESEARCH. THIS PHASE I WORK WILL INVESTIGATE THE APPLICABILITY OF EBER TO WAFER-SCALE ANALYSIS AND MAPPING OF THESE HIGH X FILMS. FOR THIS PURPOSE, WE WILL MEASURE THE E(0) AND E(1) FEATURES OF BOTH THICK (SEVERAL MICRONS) AND THIN (0.1 MICRON) MBE GROWN AL(X)GA(1-X)AS FILMS OF NOMINAL X = 0.5, 0.6, 0.7, AND 0.8. OUR OBJECTIVE IS TO OBSERVE AND PARAMETRIZE THE OPTICAL MODULATED REFLECTANCE FEATURES OF ALGAAS FILMS IN THE INDIRECT-GAP REGIME.

* information listed above is at the time of submission.

Agency Micro-sites


SBA logo

Department of Agriculture logo

Department of Commerce logo

Department of Defense logo

Department of Education logo

Department of Energy logo

Department of Health and Human Services logo

Department of Homeland Security logo

Department of Transportation logo

Enviromental Protection Agency logo

National Aeronautics and Space Administration logo

National Science Foundation logo
US Flag An Official Website of the United States Government