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CHI SYSTEMS, INC.
Gwynedd Office Park, 716 N Bethlehem Pike, Lower Gwynedd, PA, 19002
AbstractNot Available MSSA has discovered a mechanical means that can improve drift stability and sensitivity of MEMS accelerometers by orders of magnitude. This will make ultra-precise nano-g accelerometers feasible. We have a unique means that gives a flexure pivoted reference pendulum the appearance of being an inertially free pendulum, it is this discovery that will transform a moderately performing rugged accelerometer into a precision instrument that maintains its ruggedness and is capable of very long term bias stability. With the elimination of bias errors from flexure torques, it¿s feasible to evacuate the accelerometer and reduce random walk to a negligible level. This allows the accelerometer to sense vibrations as well as very low frequency motions. The nano-g accelerometer will be capable of exhibiting high sensitivities, while at the same time be capable of measuring large input levels; which is not possible in traditional MEMS accelerometer designs. Consequently, the nano-g accelerometer will operate as a true inertial displacement sensor with displacement errors that are bounded over substantial time intervals. It¿s the purpose of this program to demonstrate analytically and experimentally, that a flexure pivoted reference pendulum can perform as if it were an inertially free pendulum.
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