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New Sensor for 9 keV HRXM
Phone: (617) 668-6986
Phone: (617) 668-6845
The use of penetrating radiation such as x-rays allows probing materials for their internal structure through direct imaging methods in a non-destructive way. X-rays as more penetrating and with shorter wavelengths than visible light allow imaging internal structures with better resolution. The resolution of details can reach nm sizes. This is realized in High Resolution X-ray Microscopy (HRXM). This technique combined with a tomography approach (Computed Tomography, CT) can produce 3d representation of small objects including their internal structure. Such images allow for a fast identification of any possible defects in the structures, such as integrated circuits. In current systems often compromise between the detection efficiency and image resolution. Since x-rays are more penetrating, they require detectors with higher stopping power for example having thicker conversion screens. At the same time thicker screen reduce image resolution. To answer this solicitation we propose to develop a new conversion screen with improved detection efficiency over these used currently (e.g. YAG). In the Phase I we will conduct a trade study, in which we determine the best choice of our initial candidates based on required scintillation properties, manufacturability, and cost. reduction in time required to perform a scan or improved image quality. In evaluation of biological samples lower dose (faster scan) may limit the damage to the samples. X-ray microscopy is used in science and industry with commercial and research systems available. Both will benefit from improved detection system.
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