High-performance, cost-effective SLS arrays using conventional III-V processes
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2223 Eastman Ave., Suite B, Ventura, CA, 93003
AbstractAerius Photonics plans to develop cost-effective focal plane arrays (FPAs) based on InAs/GaSb strained layer superlattice (SLS) structures for long-wavelength infrared (LWIR) wavelength applications. Presently, the majority of arrays are fabricated in academic or laboratory environments. Building on their expertise in building large InGaAs arrays, Aerius will develop wafer processes that are straightforward to transition to a foundry. New processes, particularly those related to passivation will require modifications to ensure a smooth transition to the foundry. Aerius expects that the changes made to the passivation process will also have the beneficial effect of reducing dark current related to wafer processing. In Phase I, Aerius will perform a preliminary development of the passivation processes to assess its compatibility with SLS devices. If successful, Aerius would fully transition the process to their foundry in Phase II, and build 1K x 1K arrays ready for hybridization to the appropriate ROIC.
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