300 mm High Density Temperature Probe Card for Wafer- Level Reliability Testing

Award Information
Agency: Department of Commerce
Branch: National Institute of Standards and Technology
Contract: N/A
Agency Tracking Number: 103-03-2010
Amount: $90,000.00
Phase: Phase I
Program: SBIR
Solicitation Topic Code: N/A
Solicitation Number: N/A
Solicitation Year: N/A
Award Year: 2010
Award Start Date (Proposal Award Date): N/A
Award End Date (Contract End Date): N/A
Small Business Information
14763 Energy Way, Apple Valley, MN, 55124
DUNS: 111765657
HUBZone Owned: N
Woman Owned: N
Socially and Economically Disadvantaged: N
Principal Investigator
 Bryan Root
 (952) 232-1678
Business Contact
Phone: () -
Research Institution

Historical methods of reliability assessment are less and less effective as device sizes shrink. Already researchers are unable to package the many advanced devices because the act of cutting the wafer and the packaging operation pre-stresses or destroys the devices resulting in unreliable test results. Additionally the increasing cost of fabricating a wafer with advanced integrated circuit technology requires the designer to maximize the utilization of the wafer real estate. Additionally smaller devices require electrical characteristics and the short term and long term reliability to be know with even higher precision and accuracy. This is a proposal to design a probe card for massively parallel reliability testing to address this need. The objective of the project is to design a 300mm probe card with 5000 probes at sustained operating temperatures up to 400?C. The probes need to contact 50µm pad sizes that are typical in the industry. Additionally, the probes need to align to the pads throughout an operating envelope of 25?C to 400?C, contacting the pads after the system achieves thermal equilibrium.

* Information listed above is at the time of submission. *

Agency Micro-sites

SBA logo
Department of Agriculture logo
Department of Commerce logo
Department of Defense logo
Department of Education logo
Department of Energy logo
Department of Health and Human Services logo
Department of Homeland Security logo
Department of Transportation logo
Environmental Protection Agency logo
National Aeronautics and Space Administration logo
National Science Foundation logo
US Flag An Official Website of the United States Government