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SBIR Phase I: Real-time Spectroscopic Ellipsometer for ThinFilm Process Control

Award Information
Agency: National Science Foundation
Branch: N/A
Contract: N/A
Agency Tracking Number: 35391
Amount: $400,000.00
Phase: Phase II
Program: SBIR
Solicitation Topic Code: N/A
Solicitation Number: N/A
Timeline
Solicitation Year: N/A
Award Year: 1998
Award Start Date (Proposal Award Date): N/A
Award End Date (Contract End Date): N/A
Small Business Information
910 University Place, Evanston, IL, 60201
DUNS: N/A
HUBZone Owned: N
Woman Owned: N
Socially and Economically Disadvantaged: N
Principal Investigator
 Shankar Krishnan
 () -
Business Contact
Phone: () -
Research Institution
N/A
Abstract
N/A

* Information listed above is at the time of submission. *

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