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MICROSTRUCTURE IN FERROELECTRIC MATERIALS

Award Information
Agency: Department of Defense
Branch: Missile Defense Agency
Contract: N/A
Agency Tracking Number: 25581
Amount: $1,500,000.00
Phase: Phase II
Program: SBIR
Solicitation Topic Code: N/A
Solicitation Number: N/A
Timeline
Solicitation Year: N/A
Award Year: 1996
Award Start Date (Proposal Award Date): N/A
Award End Date (Contract End Date): N/A
Small Business Information
2440 Embarcadero Way
Palo Alto, CA 94303
United States
DUNS: N/A
HUBZone Owned: No
Woman Owned: No
Socially and Economically Disadvantaged: No
Principal Investigator
 Pajo Cvijin
 (415) 493-6100
Business Contact
Phone: () -
Research Institution
N/A
Abstract

A new technology for microfabrication is proposed. The technology offers a cost-effective way to produce mcirostructures in piezoelectric or dielectric materials, including the microstructures with high aspect ratios. These microstructures have the potential to fill critical needs in ultrasonic technology, chemical sensors, electronics and optics. In Phase I, we will fabricate selected microstructures whose geometry is representative of specific application areas, characterize the performance of the fabrication process, and start the work on optimization of process parameters, which will continue into Phase II.

* Information listed above is at the time of submission. *

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