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MICROSTRUCTURE IN FERROELECTRIC MATERIALS
Phone: (415) 493-6100
A new technology for microfabrication is proposed. The technology offers a cost-effective way to produce mcirostructures in piezoelectric or dielectric materials, including the microstructures with high aspect ratios. These microstructures have the potential to fill critical needs in ultrasonic technology, chemical sensors, electronics and optics. In Phase I, we will fabricate selected microstructures whose geometry is representative of specific application areas, characterize the performance of the fabrication process, and start the work on optimization of process parameters, which will continue into Phase II.
* Information listed above is at the time of submission. *