SYNTHESIS OF LARGE-AREA MONOCRYSTALLINE TIC AS A SUBSTRATE FOR HETEROEPITAXIAL GROWTH OF B-SIC

Award Information
Agency: Department of Defense
Branch: Navy
Contract: N/A
Agency Tracking Number: 9620
Amount: $89,804.00
Phase: Phase I
Program: SBIR
Awards Year: 1989
Solicitation Year: N/A
Solicitation Topic Code: N/A
Solicitation Number: N/A
Small Business Information
Diamond Materials Institute In
2820 E College Ave, State College, PA, 16801
DUNS: N/A
HUBZone Owned: N
Woman Owned: N
Socially and Economically Disadvantaged: N
Principal Investigator
 Dr Richard Koba
 (814) 231-6200
Business Contact
Research Institution
N/A
Abstract
THE OBJECTIVE OF THE PROGRAM IS TO SYNTHESIZE A LARGE-AREA, THIN-FILM OF MONOCRYSTALLINE TIC WHICH IS SUITABLE AS SUBSTRATE FOR THE HETEROEPITAXIAL GROWTH OF BETA-SIC. MONOCRYSTALLINE TIC CAN BE GROWN BY CHEMICAL VAPOR DEPOSITION ON A LATTICE-MATCHED SUBSTRATE. DIAMOND MATERIALS INSTITUTE INC (DMI) PLANS TO ACHIEVE THIS GOAL IN TWO PHASES. IN PHASE I, DMI PLANS TO DEMONSTRATE A NOVEL, STEP PROCESS FOR HETEROEPITAXIAL GROWTH OF TIC BY CVD. THE SUBSTRATE WILL BE A FREE-STANDING B-SIC SINGLE CRYSTAL HETEROEPITAXIALLY GROWN ON SI. DMI PROPOSES A NOVEL PROCESS TO GETTER CRYSTALLINE DEFECTS FROM THE B-SIC SURFACE BEFORE TIC DEPOSITION. REMOVAL OF CRYSTALLINE DEFECTS FROM THE SURFACE OF THE B-SIC SUBSTRATE SHOULD PREVENT NUCLEATION OF DEFECTS IN THE TIC. PHASE II WILL SCALE-UP THE PROCESS TO CREATE DEFECT-FREE, TIC MONOCRYSTALS AT LEAST 100 MM IN DIAMETER. PHASE II WILL INCLUDE HETEROEPITAXIAL GROWTH OF SEMICONDUCTOR-GRADE B-SIC ON THE MONOCRYSTALLINE TIC AND THE FABRICATION OF SEMICONDUCTOR DEVICES IN THE B-SIC.

* information listed above is at the time of submission.

Agency Micro-sites

SBA logo
Department of Agriculture logo
Department of Commerce logo
Department of Defense logo
Department of Education logo
Department of Energy logo
Department of Health and Human Services logo
Department of Homeland Security logo
Department of Transportation logo
Environmental Protection Agency logo
National Aeronautics and Space Administration logo
National Science Foundation logo
US Flag An Official Website of the United States Government