INTEGRATED CIRCUIT PLANARIZATION FOR FERROELECTRIC LIQUID CRYSTAL HYBRID OPTO-ELECTRONIC DEVICES

Award Information
Agency:
Department of Defense
Branch
Navy
Amount:
$55,539.00
Award Year:
1990
Program:
SBIR
Phase:
Phase I
Contract:
n/a
Award Id:
12407
Agency Tracking Number:
12407
Solicitation Year:
n/a
Solicitation Topic Code:
n/a
Solicitation Number:
n/a
Small Business Information
2200 Central Ave, Boulder, CO, 80301
Hubzone Owned:
N
Minority Owned:
N
Woman Owned:
N
Duns:
n/a
Principal Investigator:
Mark A Handschy
(303) 449-8933
Business Contact:
() -
Research Institute:
n/a
Abstract
FERROELECTRIC LIQUID CRYSTALS (FLCS) ARE FAST (10 MICROSECONDS), LOW-VOLTAGE, LOW-POWER ELECTRO-OPTIC MATERIALS THAT ARE VERY SUITABLE FOR HYDRIBIZATION WITH VLSI CIRCUITS TO MAKE A VARIETY OF NOVEL OPTO-ELECTRONIC DEVICES, E.G. 265 X 256 SPATIAL LIGHT MODULATORS WITH 10 KHZ FRAME RATES. SINCE THE INTEGRATED CIRCUIT (IC) MUST SERVE IN THESE DEVICES ALSO AS AN OPTCAL SUBSTRATE, SMOOTHING OF CIRCUIT TOPOGRAPHY IS NECESSARY TO ACHIEVE ACCEPTABLE DEVICE OPTICAL UNIFORMITY. WE PROPOSE HERE TO ADAPT IC WAFER-SCALE PLANARIZATION PROCESSES FOR VLSI/FLC HYBRID DEVICES. WE ALSO PROPOSE TO DEVELOP NOVEL DIE-SCALE PLANARIZATION PROCESSES TO ENABLE FABRICATION OF SMALL QUANTITIES OF "APPLICATION-SPECIFIC" OPTO-ELECTRONIC DEVICES.

* information listed above is at the time of submission.

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