A High-Gradient Electron Injector for X-Ray Chip Lithography and Microfabrication

Award Information
Agency:
National Science Foundation
Amount:
$290,797.00
Program:
SBIR
Contract:
9461156
Solitcitation Year:
N/A
Solicitation Number:
N/A
Branch:
N/A
Award Year:
1996
Phase:
Phase II
Agency Tracking Number:
29970
Solicitation Topic Code:
N/A
Small Business Information
Duly Research Inc.
1912 MacArthur Street, Rancho Palos Verde, CA, 90732
Hubzone Owned:
N
Woman Owned:
N
Socially and Economically Disadvantaged:
N
Duns:
N/A
Principal Investigator
 David U. Yu
 () -
Business Contact
Phone: () -
Research Institution
N/A
Abstract
N/A

* information listed above is at the time of submission.

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