SBIR Phase I: Piezo-Driven Inertial Stages for UHV

Award Information
Agency:
National Science Foundation
Branch
n/a
Amount:
$99,999.00
Award Year:
2003
Program:
SBIR
Phase:
Phase I
Contract:
0232923
Award Id:
62741
Agency Tracking Number:
0232923
Solicitation Year:
n/a
Solicitation Topic Code:
n/a
Solicitation Number:
n/a
Small Business Information
205 Williamson Square, Franklin, TN, 37064
Hubzone Owned:
N
Minority Owned:
N
Woman Owned:
N
Duns:
n/a
Principal Investigator:
Jeffrey Paine
() -
Business Contact:
() -
Research Institution:
n/a
Abstract
This Small Business Innovation Research Phase I project will develop a piezoelectric motor-drive with Ultra-High-Vacuum (UHV) compatibility for high-speed driving of positioning platforms. The proposed piezoelectric motor-drive will provide an as-yet unrealized combination of several desirable characteristics: nanometer and sub-nanometer precision; speeds in excess of 500 mm/s; drive capacities in the range of 10's of kilograms; and, ranges of travel in excess of 500 mm. The commercial potential of this concept will provide a revolutionary means for rapid and accurate materials handling for fabrication, inspection, metrology, and packaging of microparts and microsystems.

* information listed above is at the time of submission.

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