SBIR Phase I: Piezo-Driven Inertial Stages for UHV

Award Information
Agency: National Science Foundation
Branch: N/A
Contract: 0232923
Agency Tracking Number: 0232923
Amount: $99,999.00
Phase: Phase I
Program: SBIR
Awards Year: 2003
Solicitation Year: N/A
Solicitation Topic Code: N/A
Solicitation Number: N/A
Small Business Information
205 Williamson Square, Franklin, TN, 37064
HUBZone Owned: N
Woman Owned: N
Socially and Economically Disadvantaged: N
Principal Investigator
 Jeffrey Paine
 () -
Business Contact
Phone: () -
Research Institution
This Small Business Innovation Research Phase I project will develop a piezoelectric motor-drive with Ultra-High-Vacuum (UHV) compatibility for high-speed driving of positioning platforms. The proposed piezoelectric motor-drive will provide an as-yet unrealized combination of several desirable characteristics: nanometer and sub-nanometer precision; speeds in excess of 500 mm/s; drive capacities in the range of 10's of kilograms; and, ranges of travel in excess of 500 mm. The commercial potential of this concept will provide a revolutionary means for rapid and accurate materials handling for fabrication, inspection, metrology, and packaging of microparts and microsystems.

* Information listed above is at the time of submission. *

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