MMW and LWIR Sensor Fusion in the Same Pixel for Room Temperature Imaging

Award Information
Agency: Department of Defense
Branch: Missile Defense Agency
Contract: N/A
Agency Tracking Number: 18020
Amount: $49,995.00
Phase: Phase I
Program: SBIR
Awards Year: 1992
Solicitation Year: N/A
Solicitation Topic Code: N/A
Solicitation Number: N/A
Small Business Information
3152 Kashiwa Street, Torrance, CA, 90505
HUBZone Owned: N
Woman Owned: N
Socially and Economically Disadvantaged: N
Principal Investigator
 William Chan
 (310) 534-3666
Business Contact
Phone: () -
Research Institution
Electro-Optek will develop a sensor-fusion infrared (IR) + millimeterwave (MMW) imaging focal plane array combining electron tunneling and silicon micromachining. A gas encapsulated in a cavity micromachined on Si expands upon absorption of IR radiation, like a Golay detector, causing a deflection of the cavity wall measured by an electron tunneling probe, micromachined on the same SI wafer. MMW antennas, metal-deposited on the back of the cavity wall, connect to readout/mux electronics processed on the back of the micromachined SI wafer. The electron tunneling probe can measure atomic-sclae deflections, acting as an extremely sensitive transducer sensing IR well beyond 20 microns. The MMW-horn-shaped cavities have walls coated with a thin layer of Au, of receiving MMWs at 94 GHz and beyond. The same pixel detects IR and MMWs simultaneously, and the FPA provides all-weather, all-battle-condition target detection/recognition from clutter with near immunity to countermeasures.

* Information listed above is at the time of submission. *

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