Point Of Use Chlorine Gas Generator For Wafer Fabrication

Award Information
Agency: Department of Defense
Branch: Defense Advanced Research Projects Agency
Contract: N/A
Agency Tracking Number: 19726
Amount: $62,420.00
Phase: Phase I
Program: SBIR
Awards Year: 1993
Solicitation Year: N/A
Solicitation Topic Code: N/A
Solicitation Number: N/A
Small Business Information
P.o. Box 160, Princeton, NJ, 08542
HUBZone Owned: N
Woman Owned: N
Socially and Economically Disadvantaged: N
Principal Investigator
 William Ayers
 (609) 921-0070
Business Contact
Phone: () -
Research Institution
A point of use generator for chlorine gas production is proposed. The generator would provide ultrahigh purity chlorine which is necessary to enhance the growth rate and decrease the impurity level in silicon oxides for silicon device fabrication. The generator will also eliminate the need for environmentally unacceptable organochlorine compounds which are presently used for oxide growth enhancement. ANTICIPATED BENEFITS: The chlorine generator could provide very high purity gas to enhance silicon oxide growth. This would improve silicon device performance and stability.

* Information listed above is at the time of submission. *

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