Point of Use Generation of Hydrogen Selenide for Electronic Device Fabrication

Award Information
Agency: Department of Defense
Branch: Defense Advanced Research Projects Agency
Contract: N/A
Agency Tracking Number: 26716
Amount: $59,853.00
Phase: Phase I
Program: SBIR
Awards Year: 1994
Solicitation Year: N/A
Solicitation Topic Code: N/A
Solicitation Number: N/A
Small Business Information
P.o. Box 160, Princeton, NJ, 08542
HUBZone Owned: N
Woman Owned: N
Socially and Economically Disadvantaged: N
Principal Investigator
 William Ayers
 (609) 921-0070
Business Contact
Phone: () -
Research Institution
A point of use generator for hydrogram selenide (H2Se) gas production is proposed. The generator would greatly decrease the safety risk of wafer fabrication with the toxic gas while providing higher purity gas than is now available for semiconductor fabrication. Anticipated Benefits: The H2Se generator would find applications in the production of ZnSe light emitting diodes, CdSe and CdInSe optoelectronic devices, and as a Se doping source for diamond thin films.

* Information listed above is at the time of submission. *

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