SBIR PHASE I: On-Site Silane Gas Generator for Semiconductor Manufacturing

Award Information
Agency: National Science Foundation
Branch: N/A
Contract: 9660037
Agency Tracking Number: 35394
Amount: $75,000.00
Phase: Phase I
Program: SBIR
Awards Year: 1997
Solitcitation Year: N/A
Solitcitation Topic Code: N/A
Solitcitation Number: N/A
Small Business Information
Electron Transfer Tech
155 Campus Plaza, Edison, NJ, 08818
Duns: N/A
Hubzone Owned: N
Woman Owned: N
Socially and Economically Disadvantaged: N
Principal Investigator
 William Ayers
 () -
Business Contact
Phone: () -
Research Institution

* information listed above is at the time of submission.

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