Micro-Positioner Replacement of Piezo Actuators in Long-working Distance Interference Microscopes
Department of Commerce
National Institute of Standards and Technology
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AbstractThe NIST patented six-degree of freedom micropositioner technology associated with this subtopic has been identified by E M Optomechanical, Inc. (EMOM) as a technology that could be incorporated into the company¿s long-working distance interference microscopes. A key element in these microscopes is a piezo-actuator device, installed in a manual pitch/yaw mount, which translates a small flat mirror in nanometer-scale motions. Drawbacks in using piezo-actuators include their cost, fragility, non-linear motion, hysteresis, and high dc voltages required. EMOM believes the NIST patented micro-positioner technology could be used to develop a three-axis actuator that could replace the piezo-actuator and the pitch/yaw mount thereby improving performance and reducing cost. For this project, EMOM has assembled a highly qualified technical team also experienced in the successful commercialization of work funded through the SBIR program and other government funded research.
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