Chemical Nano-Imprint Lithography

Award Information
Agency:
Department of Defense
Branch
Defense Advanced Research Projects Agency
Amount:
$98,808.00
Award Year:
2004
Program:
SBIR
Phase:
Phase I
Contract:
W31P4Q-04-C-R233
Award Id:
68827
Agency Tracking Number:
04SB1-0511
Solicitation Year:
n/a
Solicitation Topic Code:
n/a
Solicitation Number:
n/a
Small Business Information
51 East Main Street Suite 3-A, Newark, DE, 19711
Hubzone Owned:
N
Minority Owned:
N
Woman Owned:
N
Duns:
071744143
Principal Investigator:
Ahmed Sharkawy
Senior Engineer
(302) 456-9003
sharkawy@emphotonics.com
Business Contact:
Dennis Prather
President
(302) 456-9003
dprather@ee.udel.edu
Research Institution:
n/a
Abstract
The rapid expansion in the electronics industry has given rise to what has become known as Moore's law. At its core, lies advances in lithography that enable the miniaturization of features patterned on semiconductor substrates. As the minimum feature patterned on modern integrated circuits approaches 100nm, projection photolithography is put under enormous pressure to satisfy the demands of industry. While effort in this direction is under way, the skyrocketing cost of this conventional approach prompted the development of alternative methods. Therefore, there is a need to develop lithography techniques that allow for high-resolution rapid replication of structures and overcome the limitations of currently available methods. The proposed approach is based on chemically changing the properties of the top surface polymer layer (resist) by bringing it in contact with a template coated with a catalyst, hence `chemical imprint.' It is expected to offer the resolution comparable to the resolution of the nano-imprint lithography of well below 100nm, and at the same time bypass one of its main limitations, namely the direct shaping of the polymer with the template, thus reducing stress in the latter, contributing to its longevity, improve pattern fidelity and yield, and relaxing requirements for the template preparation process.

* information listed above is at the time of submission.

Agency Micro-sites


SBA logo

Department of Agriculture logo

Department of Commerce logo

Department of Defense logo

Department of Education logo

Department of Energy logo

Department of Health and Human Services logo

Department of Homeland Security logo

Department of Transportation logo

Enviromental Protection Agency logo

National Aeronautics and Space Administration logo

National Science Foundation logo
US Flag An Official Website of the United States Government