Tunable, Low Mass, Low Loss, Millimeter Wave, MEMS RF Filters

Award Information
Agency:
Department of Defense
Branch
Air Force
Amount:
$99,935.00
Award Year:
2005
Program:
SBIR
Phase:
Phase I
Contract:
FA8718-05-C-0066
Award Id:
73197
Agency Tracking Number:
F051-230-3013
Solicitation Year:
n/a
Solicitation Topic Code:
n/a
Solicitation Number:
n/a
Small Business Information
1340 Eisenhower Place, Ann Arbor, MI, 48108
Hubzone Owned:
N
Minority Owned:
N
Woman Owned:
N
Duns:
836493759
Principal Investigator:
AlexMargomenos
Senior Research Engineer
(734) 973-6600
amargo@emagtech.com
Business Contact:
KazemSabet
President
(734) 973-6600
ksabet@emagtech.com
Research Institute:
n/a
Abstract
Emerging military, space and commercial communications systems, are placing a high premium on low-cost, small, light-weight RF electronic components, while at the same time increasing demands for higher functionality. Multiple communications and Radar systems are operating or being designed for the Ka-band (25-40 GHz) and above. This trend necessitates the utilization of high performance RF filters that operate well at that frequency band. In response to the above need, EMAG Technologies in collaboration with Purdue University propose to develop a novel, MEMS tunable high-Q filter. The proposed filter will be comprised of a series of evanescent mode cavities, which will be tuned with the use of a piezoelectric actuator. The proposed architecture requires a number of novel technologies that permit excellent RF performance, limited power consumption, low size and cost, high reliability and space qualification. In addition to that, on-wafer packaging and three-dimensional integration will be utilized for the hermetic sealing of the filters and MEMS varactors. This packaging scheme will be based on EMAG's already developed low-loss, hermetic package for single RF MEMS switches. The completed filter will be fabricated on a silicon wafer, thus allowing its integration with other planar active or passive components.

* information listed above is at the time of submission.

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