ATOMIC LAYER EPITAXY OF GALLIUM-ARSENIDE IN A ROTATING-DISK REACTOR

Award Information
Agency:
Department of Defense
Branch
Missile Defense Agency
Amount:
$765,000.00
Award Year:
1990
Program:
SBIR
Phase:
Phase II
Contract:
n/a
Award Id:
8575
Agency Tracking Number:
8575
Solicitation Year:
n/a
Solicitation Topic Code:
n/a
Solicitation Number:
n/a
Small Business Information
35 Elizabeth Ave, Somerset, NJ, 08873
Hubzone Owned:
N
Minority Owned:
N
Woman Owned:
N
Duns:
n/a
Principal Investigator:
Dr Peter Norris
(201) 753-1311
Business Contact:
() -
Research Institute:
n/a
Abstract
ATOMIC LAYER EPITAXY (ALE) IS A PROMISING GROWTH TECHNIQUE. THE ATTRACTIVENESS OF ALE FOR FUTURE DEVICE AND INTEGRATED CIRCUIT APPLICATIONS CAN BE UNDERSTOOD BY CONSIDERING SEVERAL DESIRABLE ATTRI-BUTES FOR EPITAXIAL GROWTH TECHNIQUES. THESE INCLUDE LOWER DEFECT DENSITY, IMPROVED UNIFORMITY OF THICKNESS AND DOPING, IMPROVED THICKNESS CONTROL, AND THE POSSIBILITY OF CONFORMAL EPITAXY. A MAJOR PROBLEM WITH PRESENT ALE METHODS IS LOW GROWTH RATE, WHICH IS SUBSTANTIALLY LESS THAN A MONOLAYER PER SECOND. THE FEASIBILITY IS BEINGDEMONSTRATED OF ALE GROWTH OF GALLIUM-ARSENIDE IN A ROTATING DISK GEO-METRY METALORGAIC CHEMICAL VAPOR DEPOSITION (MOCVD) REACTOR. THE PRO-PORTIONALITY OF GROWTH RATE TO ROTATION RATE IS BEING DEMONSTRATED. IT IS ANTICIPATED THAT THIS WOULD ALLOW THE FABRICATION OF STRUCTURES WHICH REQUIRE BOTH HIGH AND LOW GROWTH RATES IN A SINGLE SYSTEM WITHOUT MAJOR PERTURBATIONS DURING GROWTH. THIS IS PARTICULARLY IMPORTANTFOR STRUCTURES WHERE ABRUPT INTERFACES ARE NECESSARY AND YET HAVE SUBSTANTIAL TOTAL EPITAXIAL THICKNESS. THE DEMONSTRATION OF A SIGNIFICANT ENHANCED GROWTH RATE IS A REQUIREMENT FOR THE DEVELOPMENT OF PRACTICAL ALE-BASED MATERIALS AND DEVICE TECHNOLOGIES. SUCCESSFUL DEVELOPMENT OF THE TECHNIQUES FOR REPRODUCIBLE GROWING DEVICE-QUALITY GALLIUM-ARSENIDE BY ALE WOULD HAVE MAJOR IMPLICATIONS FOR A BROAD RANGE OF DEVICE APPLICATIONS INCLUDING SENSORS, HIGH-SPEED ELECTRONIC DEVICES AND INTEGRATED CIRCUIT DEVELOPMENT.

* information listed above is at the time of submission.

Agency Micro-sites


SBA logo

Department of Agriculture logo

Department of Commerce logo

Department of Defense logo

Department of Education logo

Department of Energy logo

Department of Health and Human Services logo

Department of Homeland Security logo

Department of Transportation logo

Enviromental Protection Agency logo

National Aeronautics and Space Administration logo

National Science Foundation logo
US Flag An Official Website of the United States Government