LOW TEMPERATURE FABRICATION OF HIGH TC SUPERCONDUCTING THIN FILMS BY PLASMA ENHANCED MOCVD PROCESS

Award Information
Agency:
Department of Defense
Branch:
Air Force
Amount:
$492,986.00
Award Year:
1991
Program:
SBIR
Phase:
Phase II
Contract:
N/A
Agency Tracking Number:
12454
Solicitation Year:
N/A
Solicitation Topic Code:
N/A
Solicitation Number:
N/A
Small Business Information
Emcore Corp.
35 Elizabeth Ave, Somerset, NJ, 08873
Hubzone Owned:
N
Socially and Economically Disadvantaged:
N
Woman Owned:
N
Duns:
N/A
Principal Investigator
 Dr Jing Zhao
 (201) 271-9090
Business Contact
Phone: () -
Research Institution
N/A
Abstract
THE TECHNIQUE OF LOW TEMPERATURE IN SITU FORMATION OF HIGH TC SUPERCONDUCTING THIN FILMS IS CRUCIAL FOR EARLY APPLICATIONS OF COPPER OXIDE-BASED CERAMIC WITH SUPERCONDUCTIVITY ABOVE LIQUID NITROGEN TEMPERATURE. SUCH PROCESS WILL PERMIT DEPOSITION OF HIGH QUALITY, SMOOTH SURFACE AND HIGH DENSITY, HIGH TC SUPERCONDUCTING FILMS ON A VARIETY OF SUBSTRATES. THE PROPOSED NOVEL PROCESS SUBSTITUTES ELECTRON KINETIC ENERGY FOR CONVENTIONAL THERMAL ENERGY AND EHANCES COMPOUND FORMATION WITH THE PRESENCE OF ACTIVATED OXYGEN GENERATED FROM DISSOCIATION OF N(2)O, THUS OFFERS LOW TEMPERATURE DEPOSITION, NON-EQUILIBRIUM FILM COMPOSITIONS, AND HIGH PRODUCT PURITY. IN ADDITION CVD PROCESS OFFERS THE ADVANTAGES OF APPLICABLE TO INEXPENSIVE AND LARGE SCALE FABRICATION. OUR PRELIMINARY RESULTS DEMONSTRATED THAT TEXTURED, HIGH DENSITY, MIRROR SMOOTH SURFACE, AND LOW CARBON YBCO FILMS HAVE BEEN IN SITU FORMED AT A REDUCED TEMPERATURE AS LOW AS 570 DEG C. FURTHER REDUCING DEPOSITION TEMPERATURE BY INCREASING MICROWAVE PLASMA POWER IS PROPOSED. OUR RESULTS INDICATES THIS METHOD IS A PROMISING PROCESS FOR SUPERCONDUCTING DEVICE TECHNOLOGY.

* information listed above is at the time of submission.

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