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Long Coherence Length Far Ultraviolet Laser for High-Resolution Nano-Fabrication

Award Information
Agency: Department of Defense
Branch: Defense Advanced Research Projects Agency
Contract: W91CRB-10-C-0080
Agency Tracking Number: 07ST1-0051
Amount: $749,992.00
Phase: Phase II
Program: STTR
Solicitation Topic Code: ST071-006
Solicitation Number: 2007.
Timeline
Solicitation Year: 2007
Award Year: 2010
Award Start Date (Proposal Award Date): 2010-04-13
Award End Date (Contract End Date): 2011-04-12
Small Business Information
1800 Green Hills Road Suite 105
Scotts Valley, CA 95066-
United States
DUNS: 009424420
HUBZone Owned: No
Woman Owned: No
Socially and Economically Disadvantaged: No
Principal Investigator
 James Jacob
 President
 (831) 440-9388
 jjj@actinix.com
Business Contact
 James Jacob
Title: President
Phone: (831) 440-9388
Email: jjj@actinix.com
Research Institution
 Sandia National Labs
 Darrell Armstrong
 
PO Box 5800
Albuquerque, NM 87185-
United States

 (505) 844-4757
 Federally funded R&D center (FFRDC)
Abstract

Cost effective semiconductor processing tools that enable the high-resolution nano-fabrication of low-volume electronics are needed by the DOD. The printing of ultra-fine gratings on silicon wafers using interference immersion lithography is envisaged as a first maskless process step in the fabrication of advanced application specific integrated circuits. Next generation interference immersion lithography tools capable of rapidly printing grating structures with half-pitches down to 26 nm over large fields will require a new class of laser source that can provide both high spatial and temporal coherence as well as high power. Line narrowed ArF excimer lasers, while essential for high volume semiconductor production, are ill-suited to this interference lithography application due to their high costs and inherently poor spatial coherence. In this DARPA STTR we will develop a 1 MHz pulsed fiber laser and wavelength extension system that delivers greater than ¼ watt of average power in the far ultraviolet (near 193.4 nm) with a coherence length of 15 cm (2 GHz FWHM bandwidth).

* Information listed above is at the time of submission. *

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