Resonant Piezoelectric-Based, Wide-Range, High-Reliability Vacuum Sensor

SARA proposes an approach for developing a vacuum pressure sensor based on a piezoelectric resonator capable of monitoring pressures ranging from 1 microTorr to >2 atmospheres.Relatively small pressure-dependent shifts in the resonant frequency of such devices have been observed and reported in literature over the pressure range of interest. SARA intends to exploit this phenomenon using a proprietary control-circuit method that will enable significantly higher accuracy of the device relative to that of the published literature.This capability will enable pressure monitoring with acceptable accuracy over the full pressure range using a single low-cost sensing element. Development of this system will lead to a compact, fully-integrated, hermetically-sealed, and orientation-insensitive device capable of real-time vacuum pressure reporting. As the sensing element is built on the high reliability, long lifespan, and low cost of piezoelectric resonators, the device will allow for permanent integration into vacuum systems for system lifetime monitoring.