"HIGH PERFORMANCE INDIUM GALLIUM ARSENIDE ARRAYS FOR THE 1.0-1.7 MICRON SPECTRUM"

Award Information
Agency:
National Aeronautics and Space Administration
Branch
n/a
Amount:
$497,211.00
Award Year:
1989
Program:
SBIR
Phase:
Phase II
Contract:
n/a
Agency Tracking Number:
6704
Solicitation Year:
n/a
Solicitation Topic Code:
n/a
Solicitation Number:
n/a
Small Business Information
Epitaxx Inc.
3490 U S Rt 1, Princeton, NJ, 08540
Hubzone Owned:
N
Socially and Economically Disadvantaged:
N
Woman Owned:
N
Duns:
n/a
Principal Investigator:
Dr Vladimir S Ban
() -
Business Contact:
() -
Research Institution:
n/a
Abstract
WE PROPOSE TO OPTIMIZE EPITAXIAL LAYERS OF IN.53GA.47AS ALLOYS WHICH DETECT LIGHT IN THE 1.0-1.7 MICRON SPECTRAL REGION. THE GOAL OF THE PROGRAM IS TO BRING THE YIELD OF INGAAS PHOTODIODES TO SUCH A LEVEL THAT PRODUCTION OF MULTI-ELEMENT (>50) LINEAR ARRAYS WITH 10% UNIFORMITY BECOMEPRACTICAL WITHIN THE PHASE I EFFORT. WE PLAN TO GROW DETECTOR STRUCTURES IN OUR HYDRIDE VAPOR PHASE EPITAXIAL (VPE) REACTOR AND THEN FULLY CHARACTERIZE THE WAFER PRIOR TO PROCESSING. FIRST, THE COMPOSITIONAL VARIATIONS ACROSS THE WAFER WILL BE DETERMINED BY X-RAY DIFFRACTION. NEXT, THE SAME WAFER WILL BE CHARACTERIZED FOR DOPING AND EPI LAYER THICKNESS UNIFORMITY WITH A NEWLY DEVELOPED NONDESTRUCTIVE ORGANIC-ON-INORGANIC C-V TECHNIQUE. THE FULLY ANALYZED WAFERS WILL THEN BE PROCESSED INTO LOW DARK CURRENT PHOTODETECTORS. USING OUR FULLY AUTOMATED COMPUTER DRIVEN WAFER PROBE STATION, MAPS OF DETECTOR DARK CURRENT, CAPACITANCE AND RESPONSIVITY WILL BE GENERATED. THE DEVICE PERFORMANCE MAPS WILL BE CORRELATED TO THE MATERIAL CHARACTERISTICS MAPS OBTAINED FOR THAT WAFER. THE OBTAINED INFORMATION WILL BE USED TO OPTIMIZE EPITAXIAL LAYER QUALITY AND THUS DEVICE YIELD. SUCH HIGH YIELD WAFERS CAN BE THEN USED FOR PRODUCTION OF MULTI-DEVICE LINEAR OR FOCAL PLANE ARRAYS OF INGAAS DETECTORS FOR APPLICATIONS IN TELECOMMUNICATIONS, OPTICAL COMPUTING, SPACE IMAGING, ASTRONOMY, ETC. THE PHASE II EFFORT WOULD INVOLVE DEVELOPMENT OF 128 ELEMENT LINEAR ARRAYS, TWO DIMENSIONAL ARRAYS AND ARRAYS OF INXGA1-XAS (.6< X < 1) FOR DETECTION OFLIGHT IN THE 2-3 UM RANGE. ORGANIC CV TECHNIQUES WILL BE OPTIMIZED AT THE UNIVERSITY OF SOUTHERN CALIFORNIA UNDER THEDIRECTION OF PROF. S.R. FORREST.

* information listed above is at the time of submission.

Agency Micro-sites

US Flag An Official Website of the United States Government