CMOS-MEMS Microgravity Accelerometer with High-Precision DC Response

Award Information
Agency: National Aeronautics and Space Administration
Branch: N/A
Contract: NNC06CA07C
Agency Tracking Number: 041111
Amount: $599,977.00
Phase: Phase II
Program: SBIR
Awards Year: 2006
Solicitation Year: 2004
Solicitation Topic Code: B1.01
Solicitation Number: N/A
Small Business Information
Evigia Systems, Inc.
P.O. box 130285, Ann Arbor, MI, 48113
DUNS: 149339223
HUBZone Owned: N
Woman Owned: N
Socially and Economically Disadvantaged: N
Principal Investigator
 Navid Yazdi
 Principal Investigator
 (734) 302-1140
 nyazdi@evigia.com
Business Contact
 Navid Yazdi
Title: President
Phone: (734) 302-1140
Email: nyazdi@evigia.com
Research Institution
N/A
Abstract
In this Phase II SBIR project a high-sensitivity low-noise all-silicon CMOS-MEMS accelerometer for quasi-steady measurements of accelerations at sub 1 micro-g levels will be developed. The outcome of the project is a capacitive microaccelerometer with a resolution of 90ng/sqrt-Hz over +/-0.1g range for Type A sensor and 0.8ug/sqrt-Hz over +/-1g for Type B sensor with programmable bandwidth from DC to programmable 0.1Hz-100Hz. The accelerometer module includes integrated low-noise CMOS circuitry with active offset and low-frequency noise cancellation to enable high-precision DC measurements. The high-performance of the sensor is enabled by innovation in both MEMS accelerometer and readout circuit technologies: i) Single-crystalline silicon capacitive accelerometer structure. The device has high sensitivity and low thermo-mechanical noise; ii) Innovative high-yield fabrication process that enables formation of high-sensitivity devices on top of CMOS wafers; iii) New and improved low-noise capacitive sensor readout CMOS circuit. This novel microaccelerometer has several NASA applications including measurement of residual accelerations on spacecraft and ground-based low-gravity facilities.

* information listed above is at the time of submission.

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