CMOS-MEMS Microgravity Accelerometer with High-Precision DC Response

Award Information
Agency:
National Aeronautics and Space Administration
Branch
n/a
Amount:
$69,963.00
Award Year:
2005
Program:
SBIR
Phase:
Phase I
Contract:
NNC05CA35C
Agency Tracking Number:
041111
Solicitation Year:
2004
Solicitation Topic Code:
B1.01
Solicitation Number:
n/a
Small Business Information
Evigia Systems Inc.
2805 Windwood Dr. #10, Ann Arbor, MI, 48105-1487
Hubzone Owned:
N
Socially and Economically Disadvantaged:
N
Woman Owned:
N
Duns:
149339223
Principal Investigator:
Navid Yazdi
Principal Investigator
(734) 302-1140
nyazdi@evigia.com
Business Contact:
Navid Yazdi
Business Official
(734) 302-1140
nyazdi@evigia.com
Research Institution:
n/a
Abstract
This Phase I SBIR effort initiates development of a high-sensitivity low-noise all-silicon CMOS-MEMS accelerometer for quasi-steady measurements of accelerations at sub 1 micro-g levels. The accelerometer module includes integrated low-noise CMOS circuitry with active offset and low-frequency noise cancellation to enable high-precision DC measurements. The high-performance of the sensor is enabled by innovation in both MEMS accelerometer and readout circuit technologies: i) Single-crystalline silicon capacitive accelerometer structure. The device has high sensitivity and low thermo-mechanical noise; ii) Innovative high-yield fabrication process that enables formation of high-sensitivity devices on top of CMOS wafers; iii) New and improved low-noise capacitive sensor readout CMOS circuit. This novel microaccelerometer has several NASA applications including measurement of residual accelerations on spacecraft and ground-based low-gravity facilities.

* information listed above is at the time of submission.

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