CMOS-MEMS Microgravity Accelerometer with High-Precision DC Response

Award Information
Agency:
National Aeronautics and Space Administration
Branch
n/a
Amount:
$69,963.00
Award Year:
2005
Program:
SBIR
Phase:
Phase I
Contract:
NNC05CA35C
Award Id:
74193
Agency Tracking Number:
041111
Solicitation Year:
n/a
Solicitation Topic Code:
n/a
Solicitation Number:
n/a
Small Business Information
2805 Windwood Dr. #10, Ann Arbor, MI, 48105
Hubzone Owned:
N
Minority Owned:
N
Woman Owned:
N
Duns:
149339223
Principal Investigator:
NavidYazdi
Principal Investigator
(734) 302-1140
nyazdi@evigia.com
Business Contact:
NavidYazdi
Business Official
(734) 302-1140
nyazdi@evigia.com
Research Institute:
n/a
Abstract
This Phase I SBIR effort initiates development of a high-sensitivity low-noise all-silicon CMOS-MEMS accelerometer for quasi-steady measurements of accelerations at sub 1 micro-g levels. The accelerometer module includes integrated low-noise CMOS circuitry with active offset and low-frequency noise cancellation to enable high-precision DC measurements. The high-performance of the sensor is enabled by innovation in both MEMS accelerometer and readout circuit technologies: i) Single-crystalline silicon capacitive accelerometer structure. The device has high sensitivity and low thermo-mechanical noise; ii) Innovative high-yield fabrication process that enables formation of high-sensitivity devices on top of CMOS wafers; iii) New and improved low-noise capacitive sensor readout CMOS circuit. This novel microaccelerometer has several NASA applications including measurement of residual accelerations on spacecraft and ground-based low-gravity facilities.

* information listed above is at the time of submission.

Agency Micro-sites


SBA logo

Department of Agriculture logo

Department of Commerce logo

Department of Defense logo

Department of Education logo

Department of Energy logo

Department of Health and Human Services logo

Department of Homeland Security logo

Department of Transportation logo

Enviromental Protection Agency logo

National Aeronautics and Space Administration logo

National Science Foundation logo
US Flag An Official Website of the United States Government