Nanomachine Device for Semiconductor Process Control Monitoring

Award Information
Agency: Department of Commerce
Branch: National Institute of Standards and Technology
Contract: 70NANB19H045
Agency Tracking Number: 156-FY19-68
Amount: $106,500.00
Phase: Phase I
Program: SBIR
Solicitation Topic Code: None
Solicitation Number: N/A
Timeline
Solicitation Year: 2019
Award Year: 2019
Award Start Date (Proposal Award Date): 2019-08-01
Award End Date (Contract End Date): 2020-01-31
Small Business Information
95 Brown Road, Ithaca, NY, 14850
DUNS: 079136589
HUBZone Owned: N
Woman Owned: N
Socially and Economically Disadvantaged: N
Principal Investigator
 Kwame Amponsah
 (607) 262-0515
 kwame.amponsah@xallent.com
Business Contact
 Kwame Amponsah
Phone: (607) 262-0515
Email: kwame.amponsah@xallent.com
Research Institution
N/A
Abstract
Conventional characterization and test methods are increasingly ineffective when applied to structures less than 100 nanometers, causing challenges across R&D, process control and failure analysis. An increasing number of subtle defects become prominent drivers of failure as device size and operating margins decrease, e.g., processing anomalies in thin gate oxides, substrate problems related to doping, line width variations. Thus, there is urgent demand for tools and techniques to non-destructively characterize semiconductor devices and thin film materials. Xallent will develop a radio frequency nanomachine device to utilize for defect identification, measurement of thin film material thickness, permittivity and conductivity.

* Information listed above is at the time of submission. *

Agency Micro-sites

SBA logo
Department of Agriculture logo
Department of Commerce logo
Department of Defense logo
Department of Education logo
Department of Energy logo
Department of Health and Human Services logo
Department of Homeland Security logo
Department of Transportation logo
Environmental Protection Agency logo
National Aeronautics and Space Administration logo
National Science Foundation logo
US Flag An Official Website of the United States Government