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Low-Cost, Micromachined Absolute Pressure Sensor

Award Information
Agency: Department of Defense
Branch: Navy
Contract: N/A
Agency Tracking Number: 32408
Amount: $69,988.00
Phase: Phase I
Program: SBIR
Solicitation Topic Code: N/A
Solicitation Number: N/A
Timeline
Solicitation Year: N/A
Award Year: 1996
Award Start Date (Proposal Award Date): N/A
Award End Date (Contract End Date): N/A
Small Business Information
309 Vassar Road
Alexandria, VA 22314
United States
DUNS: N/A
HUBZone Owned: No
Woman Owned: No
Socially and Economically Disadvantaged: No
Principal Investigator
 Robert B. Mcintosh
 (703) 370-3000
Business Contact
Phone: () -
Research Institution
N/A
Abstract

A six-month program in proposed to design and fabricate micropower, absolute pressure sensors micromachined from single-crystal silicon. The sensor utilizes a now capacitive sensing structure developed for micromachined micrometers, seismometers, and differential pressure sensors. The sensor will be housed in a package having a full form, fit, and function compatibility with existing Navy underwater weapons and oceanographic research systems. Based upon measurements with micromachined differential pressure sensors and micrometers, the noise-limited. resolution of the absolute sensor is expected to exceed 0.01" of water at a depth of 600 feet, over a 5 =Hz to 0.25-Hz bandwidth. Micropower, switchedbridge electronics have the capability to detect capacitance changes of 1 ppm. Feedback maintains a linear sensor output over a dynamic range of 120 dB. Acoustic (2 to 500 Hz) and depth sensing outputs (O.to 600 ft.) are also provided. The sensor has a self-calibration capability. The proposed sensor will be designed to the meet the storage, transport, vibration, and shock specifications for Navy airlaunched weapons. A Phase I option is proposed to performance test prototype units at the NSWC, CSS facility in Panama City, FL. Theme units will be available for, environmental testing at the onset of Phase II.

* Information listed above is at the time of submission. *

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