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Handheld Liquid-Bourne Particle Counter

Award Information
Agency: Department of Defense
Branch: Defense Microelectronics Activity
Contract: HQ072719P0007
Agency Tracking Number: 19-9A8
Amount: $149,900.13
Phase: Phase I
Program: SBIR
Solicitation Topic Code: DMEA182-001
Solicitation Number: 18.2
Solicitation Year: 2018
Award Year: 2019
Award Start Date (Proposal Award Date): 2019-02-02
Award End Date (Contract End Date): 2019-08-15
Small Business Information
16 Great Hollow Road
Hanover, NH 03755
United States
DUNS: 072021041
HUBZone Owned: No
Woman Owned: No
Socially and Economically Disadvantaged: No
Principal Investigator
 Marc Ramsey
 Principal Investigator
 (603) 643-3800
Business Contact
 Betsy Williams
Phone: (603) 640-2331
Research Institution

Semiconductor processing technology continuously advances to package greater capability into smaller footprints, leading to nanometer feature sizes. Increasingly, nanometer scale impurities can cause fatal circuit flaws. Consequently it is important to monitor semiconductor processing solvents for particle impurities in the 20 nm to 10 micron range. Existing liquid particle detectors function well, and are based on laser-illuminated Mie scattering conducted in a fixed cuvette through which the liquid is pumped. But these require either in-line or batch sampling that can be time consuming and expensive in the typical processing environment, where many containers of corrosive solvents sit in fume hoods for repeated use over a period of days or weeks. We will develop a handheld, non-contact liquid particle counter that will enable more frequent, flexible inspection of process fluids at lower cost. Our detector will achieve comparable detection efficiency to existing systems at higher volumetric sample rate, leading to rapid, flexible, convenient measurement of multiple fluids without the need for regular cleaning or maintenance.

* Information listed above is at the time of submission. *

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