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Photon Correlation Spectroscopy for Particle Counting and Sizing in Bulk Liquid

Award Information
Agency: Department of Defense
Branch: Defense Microelectronics Activity
Contract: HQ072719P0012
Agency Tracking Number: 19-9A9
Amount: $149,911.72
Phase: Phase I
Program: SBIR
Solicitation Topic Code: DMEA182-001
Solicitation Number: 18.2
Timeline
Solicitation Year: 2018
Award Year: 2019
Award Start Date (Proposal Award Date): 2019-02-01
Award End Date (Contract End Date): 2019-08-15
Small Business Information
15 Presidential Way, Woburn, MA, 01801
DUNS: 080115461
HUBZone Owned: N
Woman Owned: N
Socially and Economically Disadvantaged: N
Principal Investigator
 Noah Kolodziejski
 Senior Optical Engineer
 (781) 465-2614
 nkolodziejski@optowares.com
Business Contact
 Jeanne Hladky
Phone: (781) 243-3792
Email: jhladky@optowares.com
Research Institution
N/A
Abstract
There is a lack of in-situ, non-contact, non-destructive techniques to detect the presence of particulates contaminating bulk liquid samples in clean room environment during semiconductor processing.  Leveraging our extensive experience building optical sensor systems, we will design and build an innovative handheld particle counter using diffusive wave spectroscopy. Our handheld system can be used to detect presence of particle sizes range from 20 nm to 20 micron in ~100 mL to 4l volume liquid without disrupting the liquid and with accuracy better than 10%. Use of handheld system will allow better control of the liquid quality used during the semiconductor processing and higher process yield.

* Information listed above is at the time of submission. *

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