Sensor-Based Intelligent Adaptive Control for Plasma ProcessManufacturing

Award Information
Agency: National Science Foundation
Branch: N/A
Contract: 9461031
Agency Tracking Number: 29948
Amount: $64,550.00
Phase: Phase I
Program: SBIR
Awards Year: 1995
Solicitation Year: N/A
Solicitation Topic Code: N/A
Solicitation Number: N/A
Small Business Information
Ic Tech Inc.
2157 University Park Drive, Okemos, MI, 48864
DUNS: N/A
HUBZone Owned: N
Woman Owned: N
Socially and Economically Disadvantaged: N
Principal Investigator
 Gamze Erten
 () -
Business Contact
Phone: () -
Research Institution
N/A
Abstract
N/A

* information listed above is at the time of submission.

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