On-Wafer Measurement System for Combinatiorial Magnetic Thin Film Libraries

Award Information
Agency:
Department of Commerce
Branch
n/a
Amount:
$75,000.00
Award Year:
2002
Program:
SBIR
Phase:
Phase I
Contract:
SB1341-02-W-1020
Award Id:
57197
Agency Tracking Number:
7.12.04
Solicitation Year:
n/a
Solicitation Topic Code:
n/a
Solicitation Number:
n/a
Small Business Information
245 West Roosevelt Road, Bldg. 8 #51, West Chicago, IL, 60185
Hubzone Owned:
N
Minority Owned:
N
Woman Owned:
N
Duns:
927258277
Principal Investigator:
Donald Yuhas
President
(630) 876-8981
dyuhas@imsysinc.com
Business Contact:
Marjorie Yuhas
Vice President
() -
myuhas@imsysinc.com
Research Institution:
n/a
Abstract
As magnetic thin-film systems became part of complex industrial applications, their composition increasingly became more complicated. A means is needed to efficiently develop and systematically characterized magnetic, electronic, and mechanical properties of advanced thin-film systems. New metrological systems are required that are capable of making on-wafer measurements on large number of sites over a large region of parameter space. Combinatorial materials techniques involve fabrication of libraries with a large number of on-wafer sites, metrologies that systematically characterize these libraries are needed. This project proposes to solve an important materials characterization problem of combinatorial film libraries. The completion of this project will result in a multi-sensor magnetic properties measurement capability and paradigm for rapidly characterizing combinatorial magnetic thin-film libraries deposited on wafers. A novel scanning system will be developed and integrated with multiple sensor types (MOKE probes and Hall microprobes). This system will obtain magnetic property data on combinatorial film libraries deposited on 37-millimeter diameter wafers. The system design is such that new sensor technologies (as they become available) can be added in order to achieve more complete magnetic properties analyses. High throughput, which is one of the system parameters, is essential to keep pace combinatorial library deposition methods

* information listed above is at the time of submission.

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