IN SITU PARTICLE SENSOR FOR MICROELECTRONIC MANUFACTURING PROCESSES

Award Information
Agency: Department of Defense
Branch: Defense Advanced Research Projects Agency
Contract: N/A
Agency Tracking Number: 8728
Amount: $49,049.00
Phase: Phase I
Program: SBIR
Awards Year: 1988
Solicitation Year: N/A
Solicitation Topic Code: N/A
Solicitation Number: N/A
Small Business Information
2110 Omega Rd - Ste F, San Ramon, CA, 94583
DUNS: N/A
HUBZone Owned: N
Woman Owned: N
Socially and Economically Disadvantaged: N
Principal Investigator
 DR DONALD J HOLVE
 (415) 837-1330
Business Contact
Phone: () -
Research Institution
N/A
Abstract
REAL TIME, ON-LINE PARTICLE CONTAMINATION SENSORS FOR MICROELECTRONIC MANUFACTURING IN PROCESS EQUIPMENT ENVIRONMENTS HAVE THE POTENTIAL TO IMPROVE CHIP YIELDS THROUGH IMPROVED PROCESS CONTROL. CURRENT MICROELECTRONIC MANUFACTURING MONITORS ARE LIMITED TO LOW EFFICIENCY SAMPLING RATES AND GENERAL CLEAN-ROOM MONITORING DURING THE PRODUCTION PROCESS. PRESENTLY THERE IS NO ON-LINE SENSOR CAPABLE OF QUANTITATIVELY ASSESSING LOCAL PARTICLE CONTAMINATION DURING SHORT TIME CHANGES IN THE PROCESS ENVIRONMENT, E.G. GAS PURGING, CHEMICAL VAPOR DEPOSITION, ETC. WE PROPOSE TO DEVELOP AN IN-SITU PARTICLE MONITOR WHICH EXTENDS THE CAPABILITIES OF CURRENT CLEAN-ROOM PARTICLE COUNTER TECHNOLOGY TO RAPID MEASUREMENTS OF SUBMICRON PARTICLE SIZE AND LOW CONCENTRATION CONTAMINANTS IN MICROELECTRONIC PROCESSING EQUIPMENT.

* Information listed above is at the time of submission. *

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