SBIR Phase I: Multi-Dimensional Standing Wave Sensors for Measurement Across Dimensional Scales

Award Information
Agency:
National Science Foundation
Branch
n/a
Amount:
$100,000.00
Award Year:
2008
Program:
SBIR
Phase:
Phase I
Contract:
0740209
Award Id:
88241
Agency Tracking Number:
0740209
Solicitation Year:
n/a
Solicitation Topic Code:
n/a
Solicitation Number:
n/a
Small Business Information
2750 East WT Harris Blvd, Suite 103, Charlotte, NC, 28213
Hubzone Owned:
N
Minority Owned:
N
Woman Owned:
N
Duns:
037953622
Principal Investigator:
Shane Woody
PhD
(704) 599-0836
shane.woody@insitutec.com
Business Contact:
Shane Woody
PhD
(704) 599-0836
shane.woody@insitutec.com
Research Institute:
n/a
Abstract
This SBIR Phase I research proposal addresses a disruptive tool with the inherent ability to measure, manipulate, and modify in three dimensions across multiple dimensional scales. The basic premise is focused upon an energy source capable of delivering, creating, and sustaining a multidimensional virtual tip high aspect ratio probe. The technology and approach enable the tip to be programmed into various geometric shapes while also providing the capability to detect surface interactions in a 3D space. In nano and micro-measurement this virtual tip when equipped on a measuring machine, provides the ability to perform high speed measuring through continuous scanning, is readily scaleable to nanoscale features, and enables reach into deep cavities and holes for 3D measurement. The current scientific heritage in standing wave 1D sensors will be extended to investigate this innovative multi-dimensional sensor for high aspect ratio microscale feature measurements. Research areas include exploring linear driven mode with multi-dimensional capability, nonlinear dynamic modeling for setting up multi-harmonic standing wave modes, and investigating scaling issues for sub-micrometer feature measurements. Various recent reports have both identified microscale and nanoscale metrology tools as a bottleneck to innovation across multi-dimensional scales. Technology barriers continue to arise in three broad areas - measurement, modification, and manipulation. There are many industries now fabricating microscale features with inability to offer quality inspection tools. The market for instrumented tools operating at these scales is, and will be, disruptive thereby enabling scientific insight for emerging markets, predictive process capabilities, enhanced functionality, and connectivity across scales. This technology platform springboards into an array of applications ranging from semiconductor to MEMS.

* information listed above is at the time of submission.

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