Improved Vacuum Process for Advanced Inertial Sensors Using NanoGetters

Award Information
Agency:
Department of Defense
Branch
Navy
Amount:
$69,995.00
Award Year:
2005
Program:
SBIR
Phase:
Phase I
Contract:
N00178-05-C-3076
Award Id:
75245
Agency Tracking Number:
N051-086-0140
Solicitation Year:
n/a
Solicitation Topic Code:
n/a
Solicitation Number:
n/a
Small Business Information
INTEGRATED SENSING SYSTEMS, INC. (Currently Integrated Sensing Systems Incorporated)
391 Airport Industrial Drive, Ypsilanti, MI, 48198
Hubzone Owned:
N
Minority Owned:
N
Woman Owned:
N
Duns:
836116822
Principal Investigator:
Douglas Sparks
Executive Vice President
(734) 547-9896
dsparks@mems-issys.com
Business Contact:
Nader Najafi
President / CEO
(734) 547-9896
nader@mems-issys.com
Research Institution:
n/a
Abstract
It is proposed that new thin film gettering technology be applied to advanced inertial and gravity sensors to improve vacuum packaging. This new getter will be developed by NanoGetters, a subsidiary of ISSYS, and the only commercial getter supplier in the US, see: www.nanogetters.com. NanoGetters uses a stack of thin film metals to capture gas molecules in a vacuum package and was developed due to the short falls of conventional Non Evaporable Getters (NEGs). NanoGetter materials are already being used by more than a dozen customers in MicroElectroMechanical Systems (MEMS) to improve vacuum packaging of resonant gyroscopes, accelerometers, Coriolis mass flow sensors, density meters, RF-MEMS communication devices, IR and chemical sensors (6-10). NanoGetter films have been applied to silicon wafers, Pyrex wafers, Kovar package lids and sapphire optical lids. Due to this demonstrated flexibility to be applied to different surfaces, it is anticipated that we will be able to integrate these new getter films into a variety of vacuum packaging housings. With optimization and development this new getter technology can be applied to the RLG and AI sensor application and improve their performance and mobility.

* information listed above is at the time of submission.

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