Improved Vacuum Process for Advanced Inertial Sensors Using NanoGetters

Award Information
Agency: Department of Defense
Branch: Navy
Contract: N00178-05-C-3076
Agency Tracking Number: N051-086-0140
Amount: $69,995.00
Phase: Phase I
Program: SBIR
Awards Year: 2005
Solitcitation Year: 2005
Solitcitation Topic Code: N05-086
Solitcitation Number: 2005.1
Small Business Information
INTEGRATED SENSING SYSTEMS, INC.
391 Airport Industrial Drive, Ypsilanti, MI, 48198
Duns: 836116822
Hubzone Owned: N
Woman Owned: N
Socially and Economically Disadvantaged: N
Principal Investigator
 Douglas Sparks
 Executive Vice President
 (734) 547-9896
 dsparks@mems-issys.com
Business Contact
 Nader Najafi
Title: President / CEO
Phone: (734) 547-9896
Email: nader@mems-issys.com
Research Institution
N/A
Abstract
It is proposed that new thin film gettering technology be applied to advanced inertial and gravity sensors to improve vacuum packaging. This new getter will be developed by NanoGetters, a subsidiary of ISSYS, and the only commercial getter supplier in the US, see: www.nanogetters.com. NanoGetters uses a stack of thin film metals to capture gas molecules in a vacuum package and was developed due to the short falls of conventional Non Evaporable Getters (NEGs). NanoGetter materials are already being used by more than a dozen customers in MicroElectroMechanical Systems (MEMS) to improve vacuum packaging of resonant gyroscopes, accelerometers, Coriolis mass flow sensors, density meters, RF-MEMS communication devices, IR and chemical sensors (6-10). NanoGetter films have been applied to silicon wafers, Pyrex wafers, Kovar package lids and sapphire optical lids. Due to this demonstrated flexibility to be applied to different surfaces, it is anticipated that we will be able to integrate these new getter films into a variety of vacuum packaging housings. With optimization and development this new getter technology can be applied to the RLG and AI sensor application and improve their performance and mobility.

* information listed above is at the time of submission.

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