MEMS-Based Capacitive Pressure Sensors with Self-Calibration Capability

Award Information
Agency: Department of Defense
Branch: Navy
Contract: N65538-06-M-0080
Agency Tracking Number: N053-159-0402
Amount: $70,000.00
Phase: Phase I
Program: SBIR
Awards Year: 2006
Solicitation Year: 2005
Solicitation Topic Code: N05-159
Solicitation Number: 2005.3
Small Business Information
15400 Calhoun Drive, Suite 400, Rockville, MD, 20855
DUNS: 161911532
HUBZone Owned: N
Woman Owned: Y
Socially and Economically Disadvantaged: N
Principal Investigator
 Dan Xiang
 Research Engineer
 (301) 294-4760
Business Contact
 Mark James
Title: Contracts and Proposals Manager
Phone: (301) 294-5221
Research Institution
In this proposal, Intelligent Automation Inc. (IAI) along with its subcontractor, Professor Lynn Fuller, from Rochester Institute of Technology, proposes to develop innovative sensor architectures, electronics, and software techniques to provide the pressure sensor with capabilities of built-in self-testing and undertaking wireless communication to transmit relevant data. This effort will result in the development of a miniature, low power, self-calibrating, wireless smart sensor system that will be suitable for monitoring the pressure of mechanized control systems in surface ships and submarines. The key innovation of our proposed approach lies in the novel design and development of a Micro-Electro-Mechanical-System (MEMS) based capacitive pressure sensor. The proposed design allows for an accurate electrostatic force to be generated and applied to the sensor's diaphragm, and the simultaneous precise measurement of the resulting displacement of the diaphragm caused as a result of the application of that force. This unique ability provides us the capability to assess a sensor's health by evaluating the changes in the diaphragm's mechanical properties that contribute to the drifts in the sensor's sensitivity and linearity. Advanced electric circuits and embedded real-time algorithms will be developed to implement optimal controls and accurate measurements for pressure readouts, sensor self-calibration, and wireless communications.

* Information listed above is at the time of submission. *

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