SBIR Phase I: In-Situ Fiber-Optic Magnetic Field Sensor Array for Real-Time Process Control in Physical-Vapor Deposition Cluster Modules

Award Information
Agency: National Science Foundation
Branch: N/A
Contract: 9661691
Agency Tracking Number: 35636
Amount: $74,966.00
Phase: Phase I
Program: SBIR
Awards Year: 1997
Solicitation Year: N/A
Solicitation Topic Code: N/A
Solicitation Number: N/A
Small Business Information
1778 Fordham Way, Mountain View, CA, 94040
HUBZone Owned: N
Woman Owned: N
Socially and Economically Disadvantaged: N
Principal Investigator
 Richard Black
 () -
Business Contact
Phone: () -
Research Institution

* Information listed above is at the time of submission. *

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