SBIR Phase I: In-Situ Fiber-Optic Magnetic Field Sensor Array for Real-Time Process Control in Physical-Vapor Deposition Cluster Modules

Award Information
Agency:
National Science Foundation
Branch:
N/A
Amount:
$74,966.00
Award Year:
1997
Program:
SBIR
Phase:
Phase I
Contract:
9661691
Agency Tracking Number:
35636
Solicitation Year:
N/A
Solicitation Topic Code:
N/A
Solicitation Number:
N/A
Small Business Information
Intelligent Fiber Optic Sy
1778 Fordham Way, Mountain View, CA, 94040
Hubzone Owned:
N
Socially and Economically Disadvantaged:
N
Woman Owned:
N
Duns:
N/A
Principal Investigator
 Richard Black
 () -
Business Contact
Phone: () -
Research Institution
N/A
Abstract
N/A

* information listed above is at the time of submission.

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