SBIR Phase I: In-Situ Fiber-Optic Magnetic Field Sensor Array for Real-Time Process Control in Physical-Vapor Deposition Cluster Modules

Award Information
Agency: National Science Foundation
Branch: N/A
Contract: 9661691
Agency Tracking Number: 35636
Amount: $74,966.00
Phase: Phase I
Program: SBIR
Awards Year: 1997
Solitcitation Year: N/A
Solitcitation Topic Code: N/A
Solitcitation Number: N/A
Small Business Information
Intelligent Fiber Optic Sy
1778 Fordham Way, Mountain View, CA, 94040
Duns: N/A
Hubzone Owned: N
Woman Owned: N
Socially and Economically Disadvantaged: N
Principal Investigator
 Richard Black
 () -
Business Contact
Phone: () -
Research Institution
N/A
Abstract
N/A

* information listed above is at the time of submission.

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