MBE Thin Film Formation Using Nitrogen Source
Small Business Information
2472 Bolsover, Suite 255, Houston, TX, 77005
J. Albert Schultz
AbstractA novel nitrogen beam source will provide 5 eV atomic and molecular nitrogen to a 0.5 cm diameter circle with a flux of 10(21)/cm(2)/sec. Larger areas can be irradiated with a lower flux (eg. 10(18)/cm(2)/sec over a 2" diameter wafer). The technique will put minimal gas load into the chamber so it will be compatible with ion pumped MBE systems. The source will be used in an attempt to synthesize crystalline cBN and InGaN thin films. Nitrides in thin film form are potentially commercializable. The sale of the atom source as an add-on to thin film deposition systems is directly commercializable even after Phase I. The source may be particularly appropriate for wide bandgap nitride synthesis.
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