ATOMIC LAYER EPITAXY DEPOSITION OF N AND P DOPED CUBIC BORON NITRIDE THIN FILMS FOR HIGH TEMPERATURE SEMICONDUCTING DEVICES

Award Information
Agency: National Science Foundation
Branch: N/A
Contract: N/A
Agency Tracking Number: 27474
Amount: $65,000.00
Phase: Phase I
Program: SBIR
Awards Year: 1994
Solicitation Year: N/A
Solicitation Topic Code: N/A
Solicitation Number: N/A
Small Business Information
2472 Bolsover Ste 255, Houston, TX, 77005
DUNS: N/A
HUBZone Owned: N
Woman Owned: N
Socially and Economically Disadvantaged: N
Principal Investigator
 Kelley L Waters
 (713) 522-9880
Business Contact
Phone: () -
Research Institution
N/A
Abstract
UNDERSTANDING THE BEHAVIOR ON N- AND P-TYPE DOPED CUBIC BORON NITRIDE (CBN) THIN FILMS IS IMPORTANT TO THE ABILITY TO MAKE ELECTRONIC DEVICES TO TAKE ADVANTAGE OF THE THERMAL AS WELL AS ELECTRONIC PROPERTIES OF CBN. N- AND P-TYPE DOPED CBN ARE BEING GROWN USING ATOMIC LAYER EPITAXY (ALE) IN A MOLECULAR BEAM EPITAXY (MBE) VACUUM CHAMBER. PREVIOUSLY RESEARCHERS HAVE BEEN ABLE TO ACHIEVE BN FILMS WHICH ARE HIGHLY CUBIC IN NATURE THROUGH THE USE OF AN ATOMIC NITROGEN SOURCE AND AN ELECTRON BEAM EVAPORATOR FOR THE BORON. A DOPANT STUDY USING MASS SPECTROSCOPY OF RECOILED IONS (MSRI) TECHNIQUE AND SECONDARY ION MASS SPECTROSCOPY (SIMS) IS BEING PERFORMED TO UNDERSTAND THE VARIOUS LEVELS OF DOPING ON THE DOPED CBN SAMPLES GROWN. THE VARIOUS CONCENTRATION LEVELS OF THE CORRESPONDING-DOPANTS (BE AND MG FOR P-TYPE; SI AND S FOR N-TYPE) ARE BEING ANALYZED SO THAT THERE IS A SUFFICIENT LEVEL TO OBTAIN A P-N JUNCTION.

* Information listed above is at the time of submission. *

Agency Micro-sites

SBA logo
Department of Agriculture logo
Department of Commerce logo
Department of Defense logo
Department of Education logo
Department of Energy logo
Department of Health and Human Services logo
Department of Homeland Security logo
Department of Transportation logo
Environmental Protection Agency logo
National Aeronautics and Space Administration logo
National Science Foundation logo
US Flag An Official Website of the United States Government