Cryo-Radical Chemistry and Cluster Beam Deposition
Small Business Information
2472 Bolsover, Suite 255, Houston, TX, 77005
J. Albert Schultz
AbstractA unique approach to formation of nitride materials using matrix isolation methods will be attempted. Large quantities of reactants can be prepared and forced to react under much more controlled conditions than in CVD or MBE. Important issues that will be addressed are epitaxial growth and growth rates, both of which can potentially be better than MBD. A very promising cluster beam approach will also be investigated which may be useful in its own right. However, if both are successful approaches, they will be combined in Phase II. This work promises a new approach to nitride growth. Both the resulting materials and the equipment to make them would be saleable.
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