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SBIR Phase I: A Detector for Co-Axial Micro-focused Ion Beams for Detection of Backscattered Ions and Secondary Electrons from semi-conducting surfaces

Award Information
Agency: National Science Foundation
Branch: N/A
Contract: 0912355
Agency Tracking Number: 0912355
Amount: $99,949.00
Phase: Phase I
Program: SBIR
Solicitation Topic Code: EL
Solicitation Number: NSF 08-548
Solicitation Year: N/A
Award Year: 2009
Award Start Date (Proposal Award Date): N/A
Award End Date (Contract End Date): N/A
Small Business Information
3401 Louisiana St. Suite 355
United States
DUNS: 154074553
HUBZone Owned: No
Woman Owned: No
Socially and Economically Disadvantaged: No
Principal Investigator
 Kelley Waters
 (713) 522-9880
Business Contact
 Kelley Waters
Title: PhD
Phone: (713) 522-9880
Research Institution

This Small Business Innovation Research Phase I project is to develop a secondary electron detector which can be co-axially mounted with a micro-focused ion beam. Backscattered neutral atoms (and ions) and secondary electrons will be analyzed to give a measure both of surface element location and identity. This detector will enable unique types of secondary ion mass spectrometry. The electrons and negative backscattered ions can be energy and time analyzed to give a spatially resolved elemental image of the surface under examination. Beam damage is greatly reduced compared to secondary electron microscopy allowing its use on biological samples. This award is funded under the American Recovery and Reinvestment Act of 2009 (Public Law 111-5).

* Information listed above is at the time of submission. *

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