NANOMETER ETCHING OF GALLIUM ARSENIDE WITH THE SCANNING TUNNELING MICROSCOPE

Award Information
Agency: Department of Defense
Branch: Army
Contract: N/A
Agency Tracking Number: 8756
Amount: $49,968.00
Phase: Phase I
Program: SBIR
Awards Year: 1988
Solicitation Year: N/A
Solicitation Topic Code: N/A
Solicitation Number: N/A
Small Business Information
J & D Scientific Inc
2854 S Haven Dr, Annapolis, MD, 21401
DUNS: N/A
HUBZone Owned: N
Woman Owned: N
Socially and Economically Disadvantaged: N
Principal Investigator
 LARRY D MCCORMICK
 (301) 266-8934
Business Contact
Phone: () -
Research Institution
N/A
Abstract
SCANNING TUNNELING MICROSCOPY (STM) HAS BEEN DEMONSTRATED TO BE VALUABLE IN THE STUDY OF SURFACES. THE RESULTS OF THESE SURFACE STUDIES INDICATE THAT STM CAN ALSO BE USEFUL FOR SURFACE MODIFICATION ON THE NANOMETER SCALE. HOWEVER, BEFORE THIS POTENTIAL CAN BE FULFILLED, IT MUST BE DEMONSTRATED THAT THE STM CAN BE USED REPRODUCIBLY FOR SOLUTION ETCHING. THE GOAL OF THIS RESEARCH IS TO DEMONSTRATE THAT THE STM HAS THE CAPABILITY OF ETCHING GAAS AT THE SUBMICROMETER LEVEL.

* information listed above is at the time of submission.

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