SBIR Phase I: EUV Source for Semiconductor Metrology

Award Information
Agency:
National Science Foundation
Branch
n/a
Amount:
$99,518.00
Award Year:
2009
Program:
SBIR
Phase:
Phase I
Contract:
0839349
Award Id:
90912
Agency Tracking Number:
0839349
Solicitation Year:
n/a
Solicitation Topic Code:
n/a
Solicitation Number:
n/a
Small Business Information
1855 S. 57TH CT, Boulder, CO, 80301
Hubzone Owned:
N
Minority Owned:
N
Woman Owned:
N
Duns:
160115093
Principal Investigator:
Sterling Backus
PhD
(303) 544-9068
sbackus@kmlabs.com
Business Contact:
Sterling Backus
PhD
(303) 544-9068
sbackus@kmlabs.com
Research Institution:
n/a
Abstract
This Small Business Innovation Research Phase I project is to develop a coherent extreme ultraviolet (EUV) light source for industrial application in support of EUV lithography. The Broad impact of this project represents an area of fundamental interest to optical science. The High Harmonic Generation (HHG) process is the result of basic quantum physics at the extreme of high energy and short time scales. The development of phase matching techniques for HHG represents the precise coherent manipulation of matter on unprecedented short length and time scales. A further understanding may make it possible in future to generate coherent light at even shorter wavelengths, suitable for ultrahigh resolution biological imaging.

* information listed above is at the time of submission.

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