LumArray, Inc.

Company Information

Company Name
LumArray, Inc.
Address
15 Ward Street
Somerville, MA, 02143-4241
Phone
1 617-253-6865
URL
n/a
DUNS
187666644
Number of Employees
5

Award Totals

PROGRAM/PHASE
AWARD AMOUNT ($)
NUMBER OF AWARDS
SBIR Phase I
$641,969.00
6
SBIR Phase II
$4,717,668.00
7
STTR Phase I
$299,748.00
3
STTR Phase II
$749,934.00
1
Chart code to be here

Award List

  1. Nanometer Precision in Maskless Lithography via Software

    Amount: $750,000.00

    LumArray, Inc. proposes under Phase II to further improve its maskless zone-plate-array lithography system, to meet the requirements of manufacturers of custom chips for the DoD. Under Phase I, a prot ...

    SBIR Phase II 2010 Defense Advanced Research Projects AgencyDepartment of Defense
  2. Maskless Lithography for Fabrication of Microelectronics with 100 nm Features

    Amount: $749,257.00

    The proposed Phase II program will produce in 1 year a low-cost, flexible, maskless-lithography tool, the Model 150A, capable of patterning arbitrary-geometries at minimum half-pitch features of 150 n ...

    SBIR Phase II 2005 Defense Advanced Research Projects AgencyDepartment of Defense
  3. Maskless Lithography for Fabrication of Microelectronics with 100 nm Features

    Amount: $42,150.00

    We propose to investigate the feasibility of achieving a throughput of at least one 200 mm diameter wafer per hour, while incorporating a sub-200nm wavelength source into a maskless lithography system ...

    SBIR Phase I 2004 Defense Advanced Research Projects AgencyDepartment of Defense
  4. SBIR Phase I: Optical-Maskless-Lithography Equipment

    Amount: $99,924.00

    This Small Business Innovation Research (SBIR) Phase I research project is a step towards building an optical-maskless-lithography technology that could revolutionize patterning for a large variety of ...

    SBIR Phase I 2005 National Science Foundation
  5. SBIR Phase II: Optical-Maskless-Lithography Equipment

    Amount: $499,943.00

    This Small Business Innovation Research (SBIR) Phase II project is a major step in the development of an optical-maskless lithography technology that is capable of high resolution, high throughput, fl ...

    SBIR Phase II 2006 National Science Foundation
  6. Zone-Plate-Array Lithography for Mask Making and Military Integrated-Circuit (IC) Manufacturing

    Amount: $149,965.00

    The zone-plate-array-lithography (ZPAL) system being commercialized by Lumarray, Inc. (the ZP-150) is proposed as the ideal means of providing quick turn-around on masks for DoD integrated-circuit man ...

    SBIR Phase I 2007 NavyDepartment of Defense
  7. SBIR Phase I: Dual-Wavelength Diffractive Optics for Absorbance-Modulation Optical Lithography

    Amount: $99,999.00

    This Small Business Innovation Research Phase I project is to design dual wavelength diffractive optics for maskless absorbance modulation optical lithography. Absorbance-modulation optical lithograp ...

    SBIR Phase I 2008 National Science Foundation
  8. Zone-Plate-Array Lithography for Mask Making and Military Integrated-Circuit (IC) Manufacturing

    Amount: $749,988.00

    LumArray, Inc. proposes under Phase II to further improve its maskless zone-plate-array lithography system, to meet the requirements of manufacturers of custom chips for the DoD. Under Phase I, a pro ...

    SBIR Phase II 2008 NavyDepartment of Defense
  9. SBIR Phase I: Nanometer-Level Fidelity in Maskless Lithography

    Amount: $99,964.00

    This Small Business Innovation Research Phase I project will investigate the feasibility of achieving, by means of precision measurement and software corrections, sub-1nm feature-size control and 1nm ...

    SBIR Phase I 2009 National Science Foundation
  10. SBIR Phase II: Dual-Wavelength Diffractive Optics for Absorbance-Modulation Optical Lithography

    Amount: $468,979.00

    This award is funded under the American Recovery and Reinvestment Act of 2009 (Public Law 111-5). This Small Business Innovation Research (SBIR) Phase II project aims to develop an optical-maskless-l ...

    SBIR Phase II 2009 National Science Foundation

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