Medox Electro-optics Inc.
Ann Arbor, MI, 48105
# of Employees: 7
HUBZone Owned: N
Socially and Economically Disadvantaged: N
Woman Owned: N
LASER DRIVEN PLASMA SOURCES ARE POTENTIAL X-RAY SOURCES FOR MICROLITHOGRAPHIC APPLICATIONS. UNFORTUNATELY, TO DATE, THESE PLASMA SOURCES HAVE NOT PRODUCED THE X-RAY INTENSITIES REQUIRED FOR LARGE SCAL ...SBIRPhase II1991Defense Advanced Research Projects Agency Department of Defense
N/ASBIRPhase I1990Defense Advanced Research Projects Agency Department of Defense