Recovery of Perfluorethane from Chemical Vapor Deposition Operation in the Semiconductor Industry

Award Information
Agency:
Environmental Protection Agency
Branch:
N/A
Amount:
$225,000.00
Award Year:
1997
Program:
SBIR
Phase:
Phase II
Contract:
N/A
Agency Tracking Number:
33471
Solicitation Year:
N/A
Solicitation Topic Code:
N/A
Solicitation Number:
N/A
Small Business Information
Membrane Technology & Research
1360 Willow Rd, Suite 103, Menlo Park, CA, 94025
Hubzone Owned:
N
Socially and Economically Disadvantaged:
N
Woman Owned:
N
Duns:
N/A
Principal Investigator
 () -
Business Contact
Phone: (415) 328-2228
Research Institution
N/A
Abstract
N/A

* information listed above is at the time of submission.

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