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Recovery of Perfluorethane from Chemical Vapor Deposition Operation in the Semiconductor Industry

Award Information
Agency: Environmental Protection Agency
Branch: N/A
Contract: N/A
Agency Tracking Number: 33471
Amount: $70,000.00
Phase: Phase I
Program: SBIR
Solicitation Topic Code: N/A
Solicitation Number: N/A
Timeline
Solicitation Year: N/A
Award Year: 1996
Award Start Date (Proposal Award Date): N/A
Award End Date (Contract End Date): N/A
Small Business Information
1360 Willow Rd Suite 103
Menlo Park, CA 94025
United States
DUNS: N/A
HUBZone Owned: No
Woman Owned: No
Socially and Economically Disadvantaged: No
Principal Investigator
 () -
Business Contact
Phone: (415) 328-2228
Research Institution
N/A
Abstract

N/A

* Information listed above is at the time of submission. *

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