Recovery of Perfluorethane from Chemical Vapor Deposition Operation in the Semiconductor Industry

Award Information
Agency:
Environmental Protection Agency
Branch
n/a
Amount:
$70,000.00
Award Year:
1996
Program:
SBIR
Phase:
Phase I
Contract:
n/a
Award Id:
33471
Agency Tracking Number:
33471
Solicitation Year:
n/a
Solicitation Topic Code:
n/a
Solicitation Number:
n/a
Small Business Information
1360 Willow Rd, Suite 103, Menlo Park, CA, 94025
Hubzone Owned:
N
Minority Owned:
N
Woman Owned:
N
Duns:
n/a
Principal Investigator:
() -
Business Contact:
(415) 328-2228
Research Institute:
n/a
Abstract
N/A

* information listed above is at the time of submission.

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