Recovery of Perfluorethane from Chemical Vapor Deposition Operation in the Semiconductor Industry

Award Information
Agency:
Environmental Protection Agency
Amount:
$70,000.00
Program:
SBIR
Contract:
N/A
Solitcitation Year:
N/A
Solicitation Number:
N/A
Branch:
N/A
Award Year:
1996
Phase:
Phase I
Agency Tracking Number:
33471
Solicitation Topic Code:
N/A
Small Business Information
Membrane Technology & Research
1360 Willow Rd, Suite 103, Menlo Park, CA, 94025
Hubzone Owned:
N
Woman Owned:
N
Socially and Economically Disadvantaged:
N
Duns:
N/A
Principal Investigator
 () -
Business Contact
Phone: (415) 328-2228
Research Institution
N/A
Abstract
N/A

* information listed above is at the time of submission.

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